DV Medical - Biocompatible Thin Film Systems

System Type

PECVD Systems

Plasma Sterilization

PVD Systems

Sputtering Systems

System Series

Desk

Desktop Pro

BTT

DV-502B

Explorer

Voyager

Discovery

Discovery HDG

Helios

Integrity

Phoenix

CC-105 Ion Source

PLASMA STERILIZATION SYSTEMS

Plasma sterilization is a safe low temperature method to sterilize medical instruments. To prevent large concentrations of species from absorbing the UV rays created by the plasma, the sterilization process must be done under vacuum.

Explorer Series

Configurable for Sputtering, PVD, or PECVD applications
For use in R&D and batch production environments
Accepts up to 10" substrates
Vacuum chamber size 20" x 20" x 20" or Bell Jar up to 12" Dia. x 18" High
Automated touch screen controls or computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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Voyager Series

Configurable for Sputtering or PECVD applications
For use in R&D and batch production environments
Accepts up to 10" substrates
Vacuum chamber sizes up to 24"
Computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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Discovery Series

Available with load lock substrate transport
For use in R&D and batch production environments
Accepts up to 12" substrates
Vacuum chamber sizes up to 30"
Computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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Helios Series

Batch production system for PECVD applications
Accepts up to 39" substrates
Chamber sizes up to 44"
Computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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Integrity Series

Integrity batch production system for PVD applications

Batch production system for PVD applications
Accepts up to 31" x 61" substrates
Chamber sizes up to 80"
Computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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