PVD - Physical Vapor Deposition

System Type

PECVD

PVD

Ion Beam Etching

Sputtering

System Series

Desk

Desktop Pro

BTT

DV-502B

Explorer

Voyager

Discovery

Discovery HDG

Phoenix 400

Helios

Integrity

Phoenix

CC-105 Ion Source

PVD SYSTEMS

Physical Vapor Deposition (PVD) is a coating method that involves purely physical processes such as high temperature vacuum evaporation by electron beam , resistive or ion beam sputter bombardment rather than involving a chemical reaction.

Bench Top Turbo

Configurable for Sputtering or PVD applications
For use in R&D and sample preparation environments
Accepts up to 6" substrates
Bell jar size up to 12" dia. x 18" high
Automated touch screen controls

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DV-502B

Rapidly cycles between atmosphere and high vacuum
For use in R&D and sample preparation environments
Accepts up to 6" substrates
Bell jar size up to 12" dia. x 18" high
Automated touch screen controls

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Discovery HDG

Ion Beam Etching & Reactive Ion Beam Etching
Ion Beam Deposition & Ion Beam Assisted Deposition
Accepts up to 8" substrates
Vacuum chamber size 26" dia. x 30" wide
Computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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Explorer Series

Configurable for Sputtering, PVD, or PECVD applications
For use in R&D and batch production environments
Accepts up to 10" substrates
Vacuum chamber size 20" x 20" x 20" or Bell Jar up to 12" Dia. x 18" High
Automated touch screen controls or computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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Integrity Series

Integrity batch production system for PVD applications

Batch production system for PVD applications
Accepts up to 31" x 61" substrates
Chamber sizes up to 80"
Computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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Phoenix Series

Phoenix inline production system configurable for sputtering, PVD, PECVD applications

Inline production system configurable for Sputtering, PVD, or PECVD applications
Accepts up to 31" x 61" substrates
Chamber sizes up to 80"
Computer controlled data aquisition, remote operation and diagnostics via Process Pro® software

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