The Discovery® series represents Denton’s offerings in pilot-scale sputtering systems. Utilizing a unique orientation of the sample to the sputtering sources, Discovery® systems can process relatively large samples and achieve remarkable thickness uniformity using small ion beam sputter deposition sources. This arrangement results in low target inventory costs and allows the system to be constructed with smaller sputtering power supplies, significantly lowering both the acquisition and operating costs of the delivered system. As with all of our systems, our vacuum engineering and materials knowledge results in the best solutions for our customers.
Discovery® systems all have multi-cathode capability and are available with a complete range of process capabilities (RF/DC/Pulse sputtering, co-sputtering, RF bias, three levels of heat up to 900°C, load locks, and magazine cassette feeders) to support thin film coating deposition on substrates up to 30" in diameter. These systems are available in configurations from 18" to 35" and may be outfitted with either turbomolecular or cryogenic pumping packages. Multiple automation platforms are available on this product line; choice driven by process complexity and required end-use versatility.
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Also, get more information on Desk IV Sputter Coater.
