The
addition of the Voyager to Denton's range of deposition platforms provides
the thin film specialist with the ability to deposit a variety of films
previously difficult to produce due to the geometry of the part or the
extended deposition period required. The Voyager utilizes proven hardware
configurations developed by Denton Vacuum. The result is a robust mechanical
package supported by established controls for ease of operation and
intuitive recipe building.
Designed
to meet the thin film industry’s requirements for conformal coatings,
low temperature processing and high intrinsic uniformity, the Voyager
offers Plasma Enhanced Chemical Vapor Deposition on a convenient platform.
Particular
benefits of PECVD processes include an unlimited source of deposition
material and the ability to produce defined stresses in the film.
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our brochure for more information.
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Voyager
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