Denton
Vacuum is pleased to announce the development of a central loadlock/manipulator
system for the Discovery®
and Voyager® product
lines. This system will allow multiple deposition systems to be "linked"
together and enables multilevel processes to be executed on a single
substrate without breaking vacuum . As a consequence, the Discovery®
(RF/DC/pulsed sputtering in both confocal and lift-off geometries) and
the Voyager ® (PECVD)
are unified within a single control and processing platform. High vacuum
processing, in-situ etch, heat, and substrate magazines are available
as options.
For more information
call 856-439-9100,
e-mail info@dentonvacuum.com,
or write: Denton Vacuum, 1259 North Chruch St., Moorestown, NJ 08057,
USA