Denton Vacuum Announces Development of Precision Rotational Tooling Fixture

Denton is pleased to announce the development of a precision rotational tooling fixture which offers a new functionality for both the Discovery® and Explorer® series of Denton deposition systems. This new arrangement facilitates the deposition of materials onto the circumference of right-circular cylindrical samples. A deposition uniformity of +/- 5% has been achieved. Previously, multi-layer deposition onto this geometry has proven difficult to achieve and poor uniformity results have been experienced.

This achievement is representative of the on-going development of deposition technology at Denton Vacuum. This new capability is available in Denton’s Discovery® series deposition system which is dedicated to multi-cathode sputtering by RF and DC and which can incorporate flexible cathodes, an RF bias and temperature stages up to 800 Celsius. In addition, it can also be configured within the flexible Explorer® platform which has proven incredibly successful in the R&D and university research departments across the USA and internationally.

Today, over 80 Discovery® and 70 Explorer® units have been supplied by Denton Vacuum to customers in the USA, Europe and Asia. The system with the new rotational fixturing will go to a customer in China where their Discovery® system incorporates all of the latest enhancements developed over the lifetime of this product.

For more information, call (856) 439-9100 FAX: (856) 439-9111, E-mail info@dentonvacuum.com, or write Denton Vacuum, Inc., 1259 North Church Street, Moorestown, NJ 08057 USA.