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CC-105 Ion Source
 
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CC-105 Ion Source
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Broad Beam Cold Cathode Ion Source
The CC-105 Ion Source is designed for Ion-assisted evaporation.

Retrofits Existing Evaporation Platforms
Expands the capabilities of a majority of the evaporation systems on the market by adding IAD capabilities.

Manual or Integrated Operation
The CC-105 power supply can either integrate into the system controls for automatic operation or remain independent for manual operation.

Low Operating Pressures
The CC-105 operates in systems with O2

Improved Adhesion
In-situ cleaning of the substrate improves adhesion of the materials

CC-105 Brochure (Requires PDF reader)

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CC-105 Ion Source
 

Features

  • Uniform Film Stoichiometry
  • High Ion Current Density
  • 100% O2 compatible
  • Broad Beam
  • Compact and Economical
 

Typical Applications

  • AR Preclean
  • Metal Oxide Processing
  • Reactive Processes with Oxygen
  • Reactive Processes with Nitrogen
 
Specifications  
Ion Source Specifications Neutralizer Power Supply
Aperture: 37mm Output Voltage: -30 V
Gases: O2, AR, N Output Current: 30 A
Ion Drive Current: 0-3.5A Electrical Connection: 190-264 V
Ion Energy: 50-800 EV Size: 429mm x 43.4 mm
Ion Source: 90mm / 127mm  
Neutralizer: Tungsten Wire  
Anode Power Supply  
Output Voltage: +600 V Peak  
Output Current: 4.4 A Peak  
Electrical Connection: 190-264 V  
Size: 429mm x 87.63mm  
 
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