Home Products Application Guide Support Contact Us Downloads Shop Online DV Medical Denton Solar
 
... System Type ...
 
PECVD
PVD
Ion Beam
Etching
Sputtering
 
...   ...
 
... System Series ...
 
Desk
Desktop Pro
BTT
DV-502B
Explorer
Voyager
Discovery
Discovery HDG
Phoenix 400
Helios
Integrity
Phoenix
CC-105 Ion Source
 
...   ...
Sputtering System
 
...
Discovery Series Sputtering Systems
...
 


Discovery Series Sputtering SystemThe Discovery® series represents Denton Vacuum's offerings in pilot-scale sputtering systems. Utilizing a unique orientation of the sample to the sputtering sources, Discovery® systems can process relatively large samples and achieve remarkable thickness uniformity using small ion beam sputter deposition sources. This arrangement results in low target inventory costs and allows the system to be constructed with smaller sputtering power supplies, significantly lowering both the acquisition and operating costs of the delivered system.

Flexible Cathode Configurations
The Discovery® accommodates up to 8 cathodes with triaxis adjustment of radius, distance, and angular presentation to provide <+/-5% coating uniformity. Each cathode can be optimized for a different deposition process and target matter.
Independent electro-pneumatic source shutters and chimney assemblies prevent cross contamination of the source material.

Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.

Process Pro Upgrade Offers:

  • Consistent controls across all Denton Vacuum Products
  • Standard software makes it easy to support and avoid costly customization fees
  • Source code for your programs so you can customize your programs.
  • Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.

Large Load Locks automated to handle substrates as large as 30" in diameter and as heavy as 50 lbs.

Multiple Pumping Configurations
A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.

Discovery® Brochure (Requires PDF reader)

Get Adobe Reader

 

Typical Applications

Sputtering

  • Pilot Production
  • Optical Coatings
  • Metal Coatings
  • Nanotechnology
  • OLEDs
  • Protective Coatings

Flexible sputtering cathodes

Flexible sputtering cathodes

 
Options
Discovery 635
Discovery 785
Maximum substrate up to 8" Diameter
check
Maximum substrate up to 30" Diameter
check
RF etch / bias
check
check
Water cooled table
check
check
Reactive Flow Control
check
check
Substrate Flip
check
check
In-Situ Ellipsometery
check
check
Pump Configuration
CTI Cryopump with throttling gate valve
check
check
Turbomolecular pump with LN2 trap assembly
check
check
Two-stage rotary vane mechanical pump
check
check
Dry scroll mechanical pump
check
check
 
...   ...

 

 

Home | Products | Application Guide | Support | Contact Us | Downloads | Company | Privacy Policy
Shop Online | Sitemap | Careers | DV Medical | Denton Solar

Copyright ©2010 Denton Vacuum, LLC