The Discovery® HDG Ion Beam Deposition and Etch Platform The Discovery HDG provides a turnkey system for a range of processes: Ion Beam Deposition, Ion Beam Assisted Deposition, Ion Beam Etch, Reactive Ion Etch. Features Cool Substrate During Process Tilting to Off Axis Angles Rotation to 20 RPM   Discovery® HDG Brochure (Requires PDF reader)

Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime. Process Pro Upgrade Offers: Consistent controls across all Denton Vacuum Products Standard software makes it easy to support and avoid costly customization fees Source code for your programs so you can customize your programs. Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades. Convenient Access to Subsystems Rear or bottom mounted pumps provide easy access for service based on your workspace needs Multiple Pumping Configurations A variety of cryogenic, mechanical and turbo pump configurations are available to fit your budget and process.

Typical Applications Nanotechnology Electronics Semiconductor (Compound or Other) Materials Research Research & Development Medical Devices Precision Milling Via Etching

Options	Evaporation
HDG Tilt Fixture, Single Rotation, 6” or 8” Diameter
HDG Tilt Fixture, Planetary Rotation, Three 6” Water Cooled Planets
RF or DC Ion Beam Deposition Sources
RF or DC Ion Beam Etch and Assist Sources
Optical Spectroscopy and Point Detection
Pump Options
Turbo
Oil free mechanical