The Integrity® series is Denton Vacuum's flagship system to produce optical coatings. These systems range in size from 26” to 80+” and all utilize evaporation technology as the deposition modality. Most, if not all of these vacuum deposition systems are equipped with sources for ion beam assisted deposition and optical monitors are employed for the highest precision applications. The high end process requirements of this product line demand the highest levels of system automation. Typical applications include anti-reflection coatings, narrow band-pass filters, high/low pass filters, hot/cold mirrors and color correcting mirrors. All Integrity systems can be optomized for depositing metals. Standard or custom configurations enable you to select a configuration that meets your budget and process requirements.   Integrity® Brochure (Requires PDF reader)

Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime. Process Pro Upgrade Offers: Consistent controls across all Denton Vacuum Products Standard software makes it easy to support and avoid costly customization fees Source code for your programs so you can customize your programs. Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades. Convenient Access to Subsystems Rear or bottom mounted pumps provide easy access for service based on your workspace needs Multiple Pumping Configurations A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.

Typical Applications PECVD UV - VIS - IR Coatings Low Moisture Shift Dielectrics Protective Topcoats Ion Assisted Processes Hi / Lo Pass Filters Hot / Cold Mirrors Narrow Band Pass Filters Color Correcting Mirrors Anti-Reflection Coatings

Options	Evaporation
Single rotation
Planetary
Flip-over fixturing
Ion Source
Pump Options
Diffusion
Cryogenic
Turbo
Dry scroll mechanical
Oil free mechanical