Used in these industries:
Applications
- Mixed-Process Optical Coatings
- CIGS and Thin Film Solar Cell Development
- Aerospace Window Protective and Optical Coatings
- Semiconductor Device Development
Capabilities & Features:
- DC/Pulse DC/RF Sputtering & Co-sputtering
- Thermal and E-beam Evaporation
- Optional Third-party Evaporation
- Base Vacuum in the 10-6 to Ultra High Vacuum Scale
- Total In-situ Processing
- Load Lock with Optional Wafer Cassette Handling
- Center-point Substrate Handling Robot
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