Discovery HDG

High performance ion beam deposition and ion beam etch

Product Brochure

Used in these Industries


  • High Density Metals & Dieletrics
  • Thin Film Heads
  • Surface Texturing
  • MEMS Ion Beam Etch
  • X-ray Mirror Optics

Capabilities & Features

  • Ion Beam Deposition
  • Ion Beam Etch
  • Reactive Ion Beam Etch
  • Up to 200 mm Wafer Capability
  • Cooled Tilt and Rotate Stage