A flexible, high-vacuum evaporation or sputtering system with rapid cycle times equipped for a wide range of applications

Product Brochure

Used in these Industries


  • Rotary Shadowing for Metals & Carbon
  • Metal & Dieletric Films
  • Recipe Development
  • Small Scale Production
  • Forensic Analysis
  • Failure Analysis
  • Quality Assurance

Capabilities & Features

  • High Vaccum Gate Valve for Rapid Cycling
  • Diffusion or Turbomolecular Pump Options
  • Dedicated Sputtering or Evaporation Capability
  • Integrated Thickness Monitors and Controllers
  • AC Glow for Sample Cleaning
  • Base Vacuum in the 1 x 106 Scale
  • 6” (150 mm) Diameter Substrate Size