Explorer

A versatile, high-vacuum development and production platform for thermal evaporation, e-beam evaporation, sputtering, or even PECVD

Product Brochure

Used in these Industries

Applications

  • Optical Film Characterization & Design
  • CIGS & Advanced Materials Research
  • Advanced Electron Microscope Sample Preparation
  • Indium Bumping for Focal Plane Array Fabrication
  • Semiconductor Device Development
  • Quality Assurance
  • Failure Analysis

Capabilities & Features

  • Thermal & E-Beam Evaporation
  • Ion Beam Assisted Deposition
  • DC/Pulse DC/RF Sputtering & Co-sputtering
  • Base Vacuum in the 10^-6 to Ultra High Vacuum Scale
  • 8” (200 mm) Substrate Size or Larger
  • Load Lock Option
  • PECVD Process Options