A cluster tool enabling highly precise in-situ sputtering, evaporation and PECVD processes

Used in these Industries


  • Mixed-Process Optical Coatings
  • CIGS and Thin Film Solar Cell Development
  • Aerospace Window Protective and Optical Coatings
  • Semiconductor Device Development

Capabilities & Features

  • DC/Pulse DC/RF Sputtering & Co-sputtering
  • Thermal and E-beam Evaporation
  • Optional Third-party Evaporation
  • Base Vacuum in the 10-6 to Ultra High Vacuum Scale
  • Total In-situ Processing
  • Load Lock with Optional Wafer Cassette Handling
  • Center-point Substrate Handling Robot