The Infinity Ion Beam Deposition System provides the best quality films for the
most demanding and challenging applications.

Product Brochure

Used in these Industries


  • Optical interference coatings
  • Encapsulation films
  • Interconnects
  • Contacts
  • Under-bump metallization
  • Thin film heads
  • X-Ray mirror optics

Capabilities & Features

  • Ion Beam Deposition
  • Ion Beam Etch
  • Reactive Ion Beam Etch
  • Up to 200 mm Wafer Capability
  • Cooled Tilt and Rotate Stage