A high volume batch production evaporation system configured for demanding optical coating, semiconductor, and compound semiconductor applications

Product Brochure

Used in these Industries


  • Hi / Lo & Narrow Bandpass Filters
  • Astronomical & Military Optics
  • Indium Deposition for Focal Plane Array Assembly
  • Au & Related Coatings for GaAs & LED Devices
  • Groundplane Coatings for Semiconductors
  • Active CIGS Layers
  • Medical Components

Capabilities & Features

  • E-beam Evaporation
  • Thermal Evaporation
  • Ion Beam Assisted Deposition
  • Integrated Optical Monitor for Mulit-layer Engineered Films
  • Multiple Chamber Sizes (Coats Substrates up to Two Meters in Diamter)
  • Production Scale Wafer and Optics Handling
  • A Complete Line of Planetary Fixtures
  • Fully Automated Process Control