A PECVD system providing flexibility, process control, and sputtering options no other system
in its class can offer

Used in these Industries


  • Biocompatible Coatings for Medical Implants
  • IR Transparent Protective Films
  • Wear Coatings for Medical & Commercial Products
  • Photovoltaic Device Development
  • Optical Filters

Capabilities & Features

  • Plasma Enhance Chemical Vapor Deposition
  • Diamond-like Carbon Films
  • Ion Beam Assisted Deposition
  • 3D Component Coatings
  • Load Lock Option
  • Base Vacuum in the 10-6 to Ultra High Vacuum Scale
  • 8″ (200 mm) Substrate Size or Larger