Description
The SIG-500SP is an easy
to handle and high resolving measurement system for determining the mechanical
stress in nearly all thin film systems like dielectric and metallic coatings
or paintings.
The SIG-500SP stress measurement
system determines the mechanical stress in a thin film from the bending of the
substrate it is deposited on. The bending is calculated by the measured deflection
of two initially parallel laser beams reflected by the sample. With the knowledge
of the mechanical properties (modulus, poisson ratio and thickness) of the substrate
the stress in the thin film can be calculated.
The SIG-500SP stress measurement
system can be used in clean rooms and its operation is very easy to learn. The
mounting of samples is very easy and can be placed into the sample holder without
any further alignments. Nearly all materials can be used as substrate –
even transparent glass with a reflectivity of less than 5%.
The resolution of the system
in units of stress follows from the accuracy with which the distance between
the two laser beams is measureable. In the case of a 100nm thin film on a 150µm
thick substrate of Si, the stress resolution limit is better than -15MPa.
The included software is
intuitive and allows the storage of all measurements in a database structured
in measurement projects. Old measurements can be recoverd and evaluated at any
time.
The SIG-500SP stress measurement
system is very usefull in the production process as a quality control device,
as well as in research and development of new film systems.
Technical data
Resolution limit:
Better than -15MPa at a 150µm Si substrate with a 100nm film (at constant
temperatur conditions)
Substrates:
Nearly all materials, one side min. 5% reflectivity, typical thickness from
100µm to 1000µm
Sample holder:
Available for any substrate shape smaller than 100mm x100mm. Due to the 45°
tilted installation a reproducibility of better than 0.1mm in sample positioning
is achieved.
Detector:
PSD- or CCD-line detector
Laser: 1 diode laser module, class 3B, splitted into two parallel
beams with a distance of 20mm
Caution:
The complete system is a “LASER CLASS 1 PRODUCT”
Dimensions:
45cm x 15cm 18cm
Weight:
18kg
Data aquisition:
Special software running on standard PC or laptop
*Please allow 8-10 weeks for delivery