Denton Vacuum’s proprietary Versa cluster platform is an automated front-end option for high-volume manufacturing. It can be configured with up to two cassette load locks and six coating chambers or modules. A robotic semiconductor-grade handler moves the substrates from the load locks to the modules to be coated in multiple layers of different materials without breaking vacuum.
The Versa is designed to work with 200mm or 300mm process modules. It’s compatible with the Discovery sputter module and the Voyager PE-CVD system, and features dedicated sputter etch modules and dedicated metrology options. A dedicated pre-clean module is available as well, along with substrate conditioning.
To enable high-volume production, the Versa runs on Denton’s ProcessPro-HV software, which uses a fully automated material scheduler and recipe manager to load the modules and execute process steps across multiple chambers with accuracy and efficiency. ProcessPro-HV is SEMI E95 compliant and features comprehensive data logging and charting within the tool for process control and analysis.