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Improving Thermal Response and Thin Film Quality for Vanadium Oxide Coatings in Thermal Imaging Devices

Vanadium oxide (VOx) coatings are used to create microbolometers in many of today’s thermal imaging cameras; these components are used to convert thermal radiation into an electrical signal. Ion beam sputtering is typically the process of choice for these films, but there are some limitations, especially when it comes to achieving a higher thermal response.

One solution is a process called biased target sputtering (BTS), which enables tighter ion energy control for improved thermal response, as well as good target utilization without overspray.

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