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Infinity RM Thin Film Deposition Solution

Ion Beam Deposition

With Infinity RM, you’ll have good control over film microstructure, stoichiometry and stress through independent control of ion beam energy and flux, letting you deposit a variety of materials. The Infinity RM also provides excellent control of film thickness and uniformity, for a smooth surface, as a result of its stable deposition rates.



  • Optical interference coatings
  • Encapsulation films
  • Interconnects
  • Contacts
  • Under-bump metallization
  • Thin film heads
  • X-Ray mirror optics

How It Works

When you need a high-quality film for such demanding applications as optical interference coatings or x-ray mirror optics, the Infinity RM Ion Beam Thin Film Deposition System is the solution for you. This pre-configured, end-to-end ion beam deposition (IBD) system that offers options for hardware and monitors, provides stable deposition rates and includes a second ion source for pre-clean and ion-assisted deposition.

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