How It Works
The linear cathode-based Phoenix LC in-line system offers high throughput for large volume production and supports both planar and 3D component processing. This thin film deposition system can accommodate RF, AC, DC and pulsed DC magnetron sputtering and substrates or pallets up to GEN 3.5 glass size (600mm X 720mm). The Phoenix LC in-line automation conveys a flat pallet or carrier through the system’s linear chambers. The system can be configured with Denton’s proprietary optical process control system or color control system.
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