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Phoenix LC

Magnetron Sputtering


An automated, inline palletized conveyor system creates uniformly thick and highly homogeneous coatings, ideally suited for both challenging layer stacks and simple product mixes. Can be configured with planar or cylindrical cathodes to meet through-put requirements. The width and length of cathodes are optimized to meet your process performance and throughput requirements. The Phoenix inline palletized conveyance (IPC) system provides users optimal uniform coating thicknesses and highly homogeneous coatings.


  • Wafer metallization
  • AR & conductive transparent coatings
  • Front & back contacts for photovoltaics
  • Composite dielectric coatings
  • Discrete & hybrid circuit metallization

How It Works

The linear cathode-based Phoenix LC in-line system offers high throughput for large volume production and supports both planar and 3D component processing. This thin film deposition system can accommodate RF, AC, DC and pulsed DC magnetron sputtering and substrates or pallets up to GEN 3.5 glass size (600mm X 720mm). The Phoenix LC in-line automation conveys a flat pallet or carrier through the system’s linear chambers. The system can be configured with Denton’s proprietary optical process control system or color control system.

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