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Real-World Thin Film System Configurations for Compound Semi Applications

In this use case, we highlight possible thin film system configurations in the compound semi space, including:

  • Long throw thermal evaporation, cryogenically cooled chuck and QCM for IR imaging systems
  • A multi-cathode sputter module with a cassette load lock for laser diodes
  • A four-chamber, dual load lock cluster tool and semiconductor-grade sputter module for RF power transistors

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