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Power Semiconductor Industry Leader Chooses Denton Vacuum Integrity® Production Scale PVD Systems

October 22, 2012

Denton Ships Two Systems to Boost Production at North American Power Semiconductor Fab

Moorestown, New Jersey, October 22, 2012 – Denton Vacuum LLC, a leading global supplier of production scale thin film technology systems, today announced it has shipped and qualified two Integrity® e-beam evaporation systems for a major power semiconductor manufacturer based in North America. Power semiconductors control and convert electricity in electronic systems; they are increasingly critical in industries such as renewable energy, automotive and aerospace. “Manufacturers are rapidly improving power semiconductor technology – simplifying design, for example, and amping up performance for high demand applications,” says Rod Moore, Denton president and CEO, “To enable these advances, leading makers rely on Denton’s manufacturing systems because they’re ready to go, provide high up time and include exceptional technical support.” Integrity systems meet unique power semiconductor production requirements including high wafer throughput, extremely uniform thick films and sophisticated controls that support fab-wide communication, precision recipe management and operator efficiency.

Integrity e-beam evaporation systems offer the industry’s most comprehensive solutions for e-beam deposition, thickness control and ion-assisted evaporation. Denton’s ProcessPro® controls platform delivers a number of essential capabilities including high speed factory communication, configurable operator and process engineering access, sophisticated data-logging, remote monitoring and access, and automatic e-mail alerts of system alarms. “Manufacturers stay competitive when their equipment suppliers deliver superior process stability managed by state-of-the-art factory controls,” Moore notes. Denton installs Integrity systems worldwide to support production customers in the optics, aerospace, power semiconductor and compound semiconductor industries.

For more information about e-beam evaporation systems, please contact Vince McGinty at 856-439-9100.

About Denton Vacuum LLC

Denton Vacuum transforms barriers into thin-film technology breakthroughs for customers across the globe. With operations in the United States and China, Denton designs and develops systems that precision-coat aerospace components, advanced optics, medical implants, solar cells, semiconductor devices and much more. Fifty years of tireless innovation have produced robust offerings ranging from high-volume production platforms to unique custom-engineered systems. Denton’s technology portfolio includes thermal evaporation, e-beam evaporation, ion-beam-assisted evaporation, magnetron sputtering (including reactive sputtering), plasma-enhanced-chemical-vapor deposition (PECVD), ion etch and ion-beam-assisted deposition (IBAD). As a leading source for thin-film technology, Denton also provides value-added services and lifetime support that set new industry standards. See how barriers become breakthroughs by visiting