See how Denton Vacuum has pioneered thin film for 6 decades.

Pre-Owned Equipment

Denton Vacuum’s pre-owned equipment is the perfect addition to enhance your technology portfolio. Pre-owned equipment has shorter lead times so you can shorten your time to market while saving money. Purchasing pre-owned equipment from Denton means you have access to a service partner that can make sure your systems are well-integrated.

Discovery 300 Magnetron Sputtering System

Discovery 300 is a highly versatile magnetron sputtering system which can be configured with confocal cathodes (up to 3”x6”), one large area Gencoa cathode, or an Isoflux cathode.

  • The system comes with a high vacuum pumping package along with gauges and two MFCs for reactive sputtering.
  • The sputter system can be configured up to 12” substrate stage depending on the selected cathode configuration.
  • The sputter system has a 12” carrier cassette load lock.
  • The system ships with Process Pro HV control software featuring multi wafer processing, thorough data logging and user-friendly recipe editing and usage.
  • Plasma Emission Monitor (PEM) is available as an option in the Discovery 300 system.

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Discovery 300

Discovery 300 Magnetron Sputter System with Cassette Load Lock

Integrity I26 Evaporation System

Integrity I26 is an evaporation thin film deposition system which is configured with 4x40cc e-gun with 6kW power supply.

  • The system is also configured with one 4kVA thermal source.
  • The system comes with XTC/3 deposition controller with dual sensor.
  • The system includes a high vacuum pumping package with 2 MFCs.
  • The system can accommodate 1”x8” substrate with a single flat plate or can be configured with 4”x8” diameter planets.
  • The system ships with Process Pro control software featuring fully visualized system layout, thorough data logging and user-friendly recipe editing.
  • The system can be configured with Lambda Pro OMS.

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Integrity I26 product image

Integrity I26 Evaporation System

infinity z-flex product image

Infinity Z-Flex Ion Beam Deposition and Etch System

Infinity Z-Flex Ion Beam Deposition and Etch System

Infinity Z-Flex ion combines the best of both ion beam deposition and etch in one tool.

  • The system is configured with two RFICP sources for deposition and etch with respective beam neutralizers.
  • The system includes high vacuum pumping packaging with multiple MFCs for deposition and etch.
  • The system comes with a 12” water-cooled stage to accommodate 300mm wafers.
  • The system offers four targets of 10” diameter.
  • The system provides a quartz crystal rate controller with dual sensor for thickness control.
  • The software control system offers visualized system layout, recipe editing and user access controls.

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Infinity FA Ion Beam Delayering System

The Infinity FA is a specialized solution for etching and profiling devices with excellent delayering uniformity and minimal damage over large areas.

  • The system includes RFICP source with high performance SIMS analysis package for end point detection.
  • The system is configured with a high vacuum pumping package with multiple MFCs.
  • The system offers a 4” water-cooled stage with tilt and rotation.
  • The system comes with a single substrate load lock.
  • The control system software offers high automation and is user-friendly to operate.

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Infinity FA

Infinity FA Ion Beam Delayering System

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Tools & References Infinity FA System Brochure

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Collateral Integrity Electronic Beam Deposition

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Videos & Webinars Infinity FA Tool

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