Pre-Owned Equipment
Denton Vacuum’s pre-owned equipment is the perfect addition to enhance your technology portfolio. Pre-owned equipment has shorter lead times so you can shorten your time to market while saving money. Purchasing pre-owned equipment from Denton means you have access to a service partner that can make sure your systems are well-integrated.
Integrity I36 System
Integrity-I36-System
Integrity I36 is a high-performance e-beam evaporation system designed for precision thin film deposition and exceptional process control.
- The system features a large 36” x 36” x 42” stainless steel chamber with full-opening front door, dual sets of deposition shields, and a 4-inch viewport with shutter.
- The Integrity I36 includes a Veeco Mark II HO end Hall ion source for enhanced film adhesion and density.
- The substrate fixture accommodates two 3-segment domes for up to 18 x 6” wafers or 30 x 4” wafers, with chamber heating up to 250°C (12 kW total).
- Integrated in-situ metrology includes LambdaPro OMS, NIR and mid-IR spectrometers, and an ellipsometer for precise process monitoring.
- The system is controlled by ProcessPro software on a Windows interface.
Discovery 300 Magnetron Sputtering System
Discovery 300 Magnetron Sputter System with Cassette Load Lock
Discovery 300 is a highly versatile magnetron sputtering system which can be configured with confocal cathodes (up to 3”x6”), one large area Gencoa cathode, or an Isoflux cathode.
- The system comes with a high vacuum pumping package along with gauges and two MFCs for reactive sputtering.
- The sputter system can be configured up to 12” substrate stage depending on the selected cathode configuration.
- The sputter system has a 12” carrier cassette load lock.
- The system ships with Process Pro HV control software featuring multi wafer processing, thorough data logging and user-friendly recipe editing and usage.
- Plasma Emission Monitor (PEM) is available as an option in the Discovery 300 system.
Infinity Z-Flex Ion Beam Deposition and Etch System
Infinity Z-Flex Ion Beam Deposition and Etch System
Infinity Z-Flex ion combines the best of both ion beam deposition and etch in one tool.
- The system is configured with two RFICP sources for deposition and etch with respective beam neutralizers.
- The system includes high vacuum pumping packaging with multiple MFCs for deposition and etch.
- The system comes with a 12” water-cooled stage to accommodate 300mm wafers.
- The system offers four targets of 10” diameter.
- The system provides a quartz crystal rate controller with dual sensor for thickness control.
- The software control system offers visualized system layout, recipe editing and user access controls.
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