See how Denton Vacuum has pioneered thin film for 6 decades.

Denton Vacuum: Enabling Innovation in Thin Film Deposition and Etch

Interview with Frank Cumbo, President and CEO of Denton Vacuum

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Join Frank Cumbo, President and CEO of Denton Vacuum, as he discusses the promising future of the company. Denton Vacuum is seeing great success in many markets ranging from semiconductors, optoelectronics, and IR detectors to display, microanalysis, and sample preparation. Hear more about their plan to stay competitive as chip production ramps up and where… Read More

Plasma Ion Beam Chemical Vapor Deposition (PIB-CVD): A New Class of Thin Film Deposition

Interview with Ravindranath Viswan

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PIB-CVD is a groundbreaking thin film deposition technology with a wide range of tunability, scalability, and durability. A primary feature of PIB-CVD is that the ion current density and the ion energy can both be independently controlled without the need for substrate biasing or additional grids. To learn more about the configurations, treatments, and other… Read More

Versatile, Turnkey Solutions for Magnetron Sputtering

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Denton offers a number of magnetron configurations to meet different application requirements. Magnetron sputtering is a highly versatile thin film deposition technique for coating films with excellent adhesion and high density. Magnetron sputtering is a plasma-based coating process where a magnetically confined plasma is created near the surface of a target material. Positively charged energetic… Read More

Pre-Cleaning in Thin Film Deposition

Woman in scrubs cleaning a thin film

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The global physical vapor deposition market is expected to expand at a compound annual growth rate (CAGR) of 7.5% from 2022 to 2030. The increasing demand for this process is due to the technological advancements in the industry. PVD films are used in applications for solar cells, optical & electrical components, automobiles, wear coatings, energy… Read More

The Benefits of Bias Target Sputtering

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Enabling Sputtering from the Target Only Bias Target Sputtering (BTS) has excellent process control and stoichiometry while reducing contamination and lowering cost of ownership. The ultralow contamination leads to higher performance in lasers and fewer defects enables higher laser damage threshold. BTS is also used for EUV mask blanks which must be defect-free or the… Read More

Denton’s Versa Cluster Platform Enables Greater Thin Film Production Efficiency

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The Versa cluster platform is an automated front-end option for high-volume manufacturing for thin film deposition operation with Denton’s ProcessPro-HV software. Versa is designed to work with 200 mm or 300 mm process modules and is compatible with Discovery sputter modules and the Voyager PE-CVD system. This cluster platform has features dedicated to sputter etch… Read More

Why PIB-CVD? Process Tunability

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The process tunability of PIB-CVD makes it optimal for many thin film applications. The inherent tunability of PIB-CVD enables a wide range of film properties including flowable, soft, thin film encapsulation layers as well as hard, highly hydrophobic, and optically clear coatings. As a result, multilayer and gradient coatings can be produced in a single chamber from… Read More

Why Semiconductor Manufacturers Prefer Denton’s Collaborative Approach

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Semiconductor manufacturing often takes a hardware-centric perspective when selecting equipment and vendors. However, manufacturers can benefit from a vendor’s industry experience and, instead, take an application-specific route. A partner like Denton Vacuum, with decades of experience, can address key concerns to get you to production faster than piecing together OEM parts. Working with a single vendor, or… Read More

SIMS Analytics for Semiconductors

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Secondary ion mass spectroscopy (SIMS) is a technique for compositional analysis of solid surfaces (such as semiconductors) in which material is removed from a surface by ion beam sputtering and the resultant positive and negative ions are analyzed in a mass spectrometer. This technique can be used to analyze the composition of semiconductor devices and… Read More

A Look Ahead at the Semiconductor Industry

2 robotic arms manufacturing a semiconductor

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Semicon West 2022 connected business and technology leaders, researchers, and industry analysts from across the microelectronics supply chain in California and online for their annual event. Here are some key takeaways from the conference. Semiconductor Market on Track to a Trillion The semiconductor industry faced several recent challenges and has seen disruptions. A crisis response… Read More