See how Denton Vacuum has pioneered thin film for 6 decades.


6 Benefits of Plasma Emission Monitoring (PEM)

PEM is a closed-loop control system used for reactively sputtering pure metal targets to produce metal oxide and nitride thin films at a high rate. Denton Vacuum’s fully automated and integrated PEM produces high-quality compound films by monitoring plasma characteristics and adjusting the gas flow based on the feedback it receives.

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