Denton Vacuum’s LambdaPro® OMS enables you to maximize yield by controlling the deposition during a run and achieving repeatable performance from run to run. The LamdaPro OMS monitors the properties of an optic in real time as it is being deposited, using the reflection of – or the transmission through – a substrate or witness chip. This direct monitoring of a substrate or indirect monitoring of a witness chip lets you terminate the deposition at the desired optical thickness.
The LambdaPro® Optical Monitoring System is highly configurable to meet your exact specifications and will result in increased production yields on multi-layer optics. This solution offers complete integration into Denton’s computer-controlled system, providing both a high signal scan rate and analog to digital conversions, while working in both reflection and transmission modes.