Denton Vacuum’s LambdaPro® OMS enables you to maximize yield by controlling the deposition during a run and achieving repeatable performance from run to run. The LamdaPro OMS monitors the properties of an optic in real time as it is being deposited, using the reflection of – or the transmission through – a substrate or witness chip. This direct monitoring of a substrate or indirect monitoring of a witness chip lets you terminate the deposition at the desired optical thickness.
The LambdaPro® OMS provides dramatic results in optical thickness and uniformity for multiple film stacks, while providing keen insight into the index being achieved in real time, along with film stoichiometry. Since our OMS is measuring optical thickness and not physical thickness, this solution is excellent for complex, multilayer optical stacks.
Using a fully automated and programmable chip changer, the LambdaPro® OMS houses 50 chips and can index them accordingly with receiver for collection of spent chips for post-coating examination of monitor-to-work ratios and index verification. Incorporation of the crystal sensor at the chip changer supports real-time monitor-to-work relationships and high repeatability. Running in a Windows environment with all calculations performed by Labview, the OMS can be configured for selected wavelength ranges between 400 and 2200 nanometers with peak detection set for maximum sensitivity and sine wave functions.