Denton Vacuum. Enabling Innovation.

Denton Vacuum technology enables innovation. As thin film industry pioneers, we consistently raise the bar in product performance and outstanding service – and in delivering the latest in thin film technologies. With a strong focus on sputtering, evaporation & PECVD vacuum deposition systems for high-volume production and R&D, Denton Vacuum leads the market in advancing thin film technologies that enable innovation.

DV-502 »

  • Thermal Evaporation, DC & RF Sputtering
  • High-vacuum gate improves cycle times increasing throughput
  • Accommodate larger sample sizes

EXPLORER »

  • Production and Research & Development
  • Evaporation, Sputtering & PECVD

VOYAGER »

  • Sputtering & PECVD
  • Conformal coatings, low temp processing & high intrinsic uniformity

DISCOVERY »

  • Sputtering platform
  • Up to six cathodes

DISCOVERY HDG »

  • Ion beam etching & deposition

PHOENIX 400 »

  • High volume magnetron sputtering
  • For cathodes up to 60" long
  • Single load-lock for entry and exit

PHOENIX 400 X »

  • In-line, multi-cathode sputtering system

INFINITY »

  • Sputtering and PECVD
  • Scalable, multi-chamber, multi-process design

INTEGRITY »

  • High-volume evaporation system
  • Optimized for optical coating applications
  • E-beam, thermal resistance and Ion-beam assisted deposition

DESKTOP PRO »

  • Versatile, high vacuum, DC & RF sputtering platform.
  • Pumps down to high vacuum (10-6 torr range) in under 30 minutes
  • Supports up to two cathodes in a confocal configuration delivering high uniformity films over a 4
  • Uses less than 36" of desk top space

BENCHTOP TURBO »

  • Versatile full-range low-voltage (resistive) thermal evaporation platform
  • Can be configured for high resolution electron microscopy sample preparation
  • Coats up to 8-inch substrate

DV-502 »

  • Thermal Evaporation, DC & RF Sputtering
  • High-vacuum gate improves cycle times increasing throughput
  • Accommodate larger sample sizes

EXPLORER »

  • Production and Research & Development
  • Evaporation, Sputtering & PECVD

VOYAGER »

  • Sputtering & PECVD
  • Conformal coatings, low temp processing & high intrinsic uniformity

DISCOVERY »

  • Sputtering platform
  • Up to six cathodes

DISCOVERY HDG »

  • Ion beam etching & deposition

PHOENIX 400 »

  • High volume magnetron sputtering
  • For cathodes up to 60" long
  • Single load-lock for entry and exit

PHOENIX 400 X »

  • In-line, multi-cathode sputtering system

INFINITY »

  • Sputtering and PECVD
  • Scalable, multi-chamber, multi-process design

INTEGRITY »

  • High-volume evaporation system
  • Optimized for optical coating applications
  • E-beam, thermal resistance and Ion-beam assisted deposition

DESK V HP »

  • A sputtering system that can be equipped for carbon evaporation
  • The DESK V HP is the global standard for electron microscopy sample preparation

BENCHTOP TURBO »

  • Versatile full-range low-voltage (resistive) thermal evaporation platform
  • Can be configured for high resolution electron microscopy sample preparation

DV-502 »

  • Thermal Evaporation, DC & RF Sputtering
  • High-vacuum gate improves cycle times increasing throughput
  • Accommodate larger sample sizes